Effect of Boron-Nitride Formation at the Interface of Diffusion Barrier in Tungsten Polymetal Gate Stacks on Gate Interfacial Resistance
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- SUNG M. G.
- R&D Division, Hynix Semiconductor Inc.
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- LIM K. Y.
- R&D Division, Hynix Semiconductor Inc.
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- KIM Y. S.
- R&D Division, Hynix Semiconductor Inc.
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- CHO H. J.
- R&D Division, Hynix Semiconductor Inc.
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- LEE S. R.
- R&D Division, Hynix Semiconductor Inc.
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- JANG S. A.
- R&D Division, Hynix Semiconductor Inc.
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- JOO M. S.
- R&D Division, Hynix Semiconductor Inc.
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- LEE J. H.
- R&D Division, Hynix Semiconductor Inc.
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- KIM T. Y.
- R&D Division, Hynix Semiconductor Inc.
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- YOUN T. O.
- R&D Division, Hynix Semiconductor Inc.
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- KIM J. H.
- R&D Division, Hynix Semiconductor Inc.
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- KIM G. O.
- R&D Division, Hynix Semiconductor Inc.
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- HWANG Y. T.
- R&D Division, Hynix Semiconductor Inc.
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- YANG H. S.
- R&D Division, Hynix Semiconductor Inc.
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- KU J. C.
- R&D Division, Hynix Semiconductor Inc.
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- KIM J. W.
- R&D Division, Hynix Semiconductor Inc.
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2007 1152-1153, 2007-09-19
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- CRID
- 1571980075565686528
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- NII論文ID
- 10022551925
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- NII書誌ID
- AA10777858
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- 本文言語コード
- en
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- データソース種別
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