Ｘ線リソグラフィーにより作製した三次元交差型流路を持つ新規マイクロミキサー

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タイトル別名
  • A Novel Micromixer with Three-Dimensionally Cross-Linked Capillary Array Structure Fabricated by Deep X-ray Lithography
  • Xセン リソグラフィー ニ ヨリ サクセイシタ 3ジゲン コウサガタ リュウロ オ モツ シンキ マイクロミキサー

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A novel micromixer is proposed, fabricated and verified. The new concept of the micromixere is to cross-link the many capillaries in three-dimensional structure. The characteristic flow behaviors are simulated by using computational fluid dynamics(CFD) software “FLUENT”. The results of the CFD shows unique mixing behavior in three-dimensionally cross-linked capillaries. The mixing performance of the micromixer is strongly influenced by controlling the three-dimensional crossing condition. The micromixer is fabricated by means of deep X-ray lithography with multi step exposure. The cross-linked capillary structures are successfully fabricated with controlled cross-link conditions. The performance of micromixer is evaluated by using a kind of enzyme reaction. By comparing mixture, mixed with cross-linked fluid filter and fluid filter without cross-linked capillaries, we found out the speeding up of the reaction by using new micromixer.

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