書誌事項
- タイトル別名
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- Neutralization by a Corona Discharge Ionizer in Nitrogen Atmosphere
- チッソ フンイキ デノ コロナ ホウデン イオナイザー ニ ヨル ジョデン
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An electrostatic neutralization of multilayer-loading silicon wafers is demonstrated using a corona discharge ionizer in nitrogen atmosphere, where ac and dc voltages are applied to two needle electrodes for generation of the negative- and positive-charged particles, respectively. We observe a surface potential of the silicon wafer decreases from ±1kV to ±20V within three seconds. Moreover, the density profiles of the charged particles generated by the electrodes are experimentally and theoretically investigated in nitrogen and air atmospheres. Our results show the possibility that the negative-charged particles contributing to the electrostatic neutralization are electrons and negative ions in nitrogen and air atmospheres, respectively.
収録刊行物
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- 電気学会論文誌. A
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電気学会論文誌. A 129 (3), 146-152, 2009
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679569785088
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- NII論文ID
- 10024772852
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- NII書誌ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- NDL書誌ID
- 10183113
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可