Development of Magnetic-Field-Driven Micro-Gas Valve

• Okazaki Teiko

  Graduate School of Science and Technology, Hirosaki University

• Tanaka Masamune

  Graduate School of Science and Technology, Hirosaki University

• Ogasawara Naoki

  Graduate School of Science and Technology, Hirosaki University

• Furuya Yasubumi

  Graduate School of Science and Technology, Hirosaki University

• Saito Chihiro

  Namiki Precision Jewel Co., Ltd.

• Imaizumi Nobuo

  Namiki Precision Jewel Co., Ltd.

抄録

Giant magnetostrictive Fe-Pd and Fe-Ga alloys are promising as actuator/sensor materials with high respective velocity and stress created by magnetostriction. To apply them to a micro-gas valve, we developed magnetostrictive actuators, that is, Fe₈₀Ga₂₀/Ni and Fe_70.4Pd_29.6/Ni bimorph layers. These cantilever-type actuators can be bent by applying magnetic field parallel to length. An actuator point displaced about 300 μm under a low magnetic field of 37 kAm⁻¹. Small and large actuators were applied to a micro-gas valve. The opening and closing action of a gas valve consisting of magnetostrictive bimorph layers can be controlled remotely by magnetic fields. Gas flow rate can be driven from 50 to 0 mL·min⁻¹ by increasing the magnetic field to 40 kAm⁻¹. The response time to the applied magnetic field is below 0.15 s.

収録刊行物

• MATERIALS TRANSACTIONS

  MATERIALS TRANSACTIONS 50 (3), 461-466, 2009

  公益社団法人 日本金属学会

キーワード

• magnetostriction
• actuator
• bimorph layers
• micro-gas valve

詳細情報

• CRID: 1390282679225606016
• NII論文ID: 10024812288
• NII論文ID: 130004454154
• NII書誌ID: AA1151294X
• DOI: 10.2320/matertrans.mbw200805
• ISSN: 13475320
• ISSN: 13459678
• NDL書誌ID: 10168802
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I10168802
• Web Site: https://www.jstage.jst.go.jp/article/matertrans/50/3/50_MBW200805/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
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