The development and characteristics of a high-speed EELS mapping system for a dedicated STEM

• ISAKOZAWA Shigeto

  Hitachi High-Technologies Corp.

• KAJI Kazutoshi

  Hitachi High-Technologies Corp.

• JARAUSCH Konrad

  Hitachi High Technologies America, Inc.

• TERADA Shohei

  Hitachi Research Lab., Hitachi Ltd.

• BABA Norio

  Kogakuin-University

Journal

• Journal of electron microscopy

  Journal of electron microscopy 57 (2), 41-45, 2008-04-01

Keywords

• electron energy loss spectroscopy (EELS)
• scanning transmission electron microscope (STEM)
• elemental mapping
• spatial resolution
• ratio map image
• three-window method
• EELS imaging

Details

• CRID: 1573105975718463872
• NII Article ID: 10025603843
• NII Book ID: AA00697060
• ISSN: 00220744
• Text Lang: en
• Data Source:
  • CiNii Articles