Development of a stage-scanning system for high-resolution confocal STEM

• TAKEGUCHI Masaki

  Advanced Nano-characterization Center, National Institute for Materials Science

• HASHIMOTO Ayako

  Advanced Nano-characterization Center, National Institute for Materials Science

• SHIMOJO Masayuki

  High Voltage Electron Microscopy Station, National Institute for Materials Science

• MITSUISHI Kazutaka

  High Voltage Electron Microscopy Station, National Institute for Materials Science

• FURUYA Kazuo

  High Voltage Electron Microscopy Station, National Institute for Materials Science

収録刊行物

• Journal of electron microscopy

  Journal of electron microscopy 57 (4), 123-127, 2008-08-01

キーワード

• confocal scanning transmission electron microscopy
• stage-scanning system
• piezo actuators
• optical sectioning
• three-dimensional scanning
• pinhole

詳細情報

• CRID: 1573668925671439744
• NII論文ID: 10025604087
• NII書誌ID: AA00697060
• ISSN: 00220744
• 本文言語コード: en
• データソース種別:
  • CiNii Articles