窒素イオン照射を用いたＰＴＦＥ表面改質効果のイオンエネルギー依存性

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  • Dependence of Ion Energy on PTFE Surface Modification Effect by Nitrogen Ion Irradiation
  • チッソ イオン ショウシャ オ モチイタ PTFE ヒョウメン カイシツ コウカ ノ イオンエネルギー イソンセイ

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PTFE (Poly-tetra-fluoro-ethylene) has superior characteristic. But, it has low adhesion force. In order to improve adhesion force, we have studied on surface modification of PTFE by using discharge under high E/n (E:electric field, n:particle density) condition in nitrogen. From the results, it was deduced that ion energy around 40 eV is effective for polar groups introduction. In addition, treated surface unevenness did not increase compared with the untreated one. Then, we performed nitrogen ion irradiation by changing ion energy. From the results, it is shown that low ion energy is effective for polar groups introduction. It is also shown that high energy ion suppresses surface roughness.<br>Thus, we measured surface energy and composition of samples irradiated by high and low energy ions. When ion with 30 eV was irradiated for 5 minute and following it ion with 1060 eV was irradiated for 10 second, many polar groups were introduced and surface unevenness was kept at the untreatment level. From the results by XPS (X-ray Photoelectron Spectroscopy) analysis and FT-IR (Fourier transform Infrared Spectroscopy) analysis by using the ATR (Attenuated Total Reflection) method, it was confirmed that polar groups of oxygen component and cross-linked structure via nitrogen or carbon was introduced at the surface.

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