燃焼炎３段階ダイヤモンド合成法における初期成長膜構造と接合強度との関係

• 高橋 護

  秋田大学工学資源学部機械工学科

• 神谷 修

  秋田大学工学資源学部機械工学科

• 大好 直

  秋田大学工学資源学部機械工学科

書誌事項

タイトル別名

• Relationship between Bonding Strength and Structure of Initial Growth Film for Synthesized Diamond by Three-step Method Using Combustion Flame
• ネンショウエン 3 ダンカイ ダイヤモンド ゴウセイホウ ニ オケル ショキ セイチョウ マク コウゾウ ト セツゴウ キョウド ト ノ カンケイ

抄録

Diamond films were synthesized on a Mo substrate using combustion flame. During the cooling process, most diamond films delaminated at the interface of the diamond film and Mo substrate. This was caused by the thermal stresses due to a mismatch of thermal expansion between the diamond film and the Mo substrate. In previous study, a three-step synthesis method was proposed. And, scratching treatments on the surface of the substrate (#180, 400, 800, 1500) and distances of the flame inner cone from the substrate (d=1.0, 1.5, 2.0, 2.5, 3.0mm) were investigated as influence factors of the delamination. To prevent the delamination, optimal conditions #400 and d=1.5mm of diamond films synthesized using combustion flame were obtained. The results showed that the delamination was able to prevent by high probability, but it was not able to protect completely. This research investigated the nucleus generation of the diamond film for 60 seconds of first step of the method. The nucleus generation of the diamond film was most important to prevent the delamination. The results showed that the effects of the nucleus generation on the delamination and the bonding strength became clear. Under optimal conditions #400 and d=1.5mm, the nucleus density was large and the nucleus size was small. It confirmed that the delamination was able to protect for these reasons at #400 and d=1.5mm. The delamination test by the indentation to delamination-free diamond films synthesized by the method was performed, and the bonding strength was discussed. It was concluded that diamond films synthesized by the method at d=1.5mm had high bonding strength.

収録刊行物

• 高温学会誌

  高温学会誌 32 (5), 295-304, 2006

  一般社団法人 スマートプロセス学会 （旧高温学会）

キーワード

• Synthesized Diamond Film
• Combustion Flame
• Delamination
• Bonding Strength
• Delamination Test by the Indentation

詳細情報

• CRID: 1390282681406364288
• NII論文ID: 10029254466
• NII書誌ID: AN00080051
• DOI: 10.7791/jhts.32.295
• COI: 1:CAS:528:DC%2BD28XhtlWms7vP
• NDL書誌ID: 8523918
• ISSN: 03871096
• ISSN: http://id.crossref.org/issn/03871096
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8523918
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
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