表面間力の定量的評価に基づくMEMSスイッチのスティクション防止膜の検討

• 山下 崇博

  東京大学大学院工学系研究科

• 伊藤 寿浩

  独立行政法人産業技術総合研究所集積マイクロシステム研究センター

• 須賀 唯知

  東京大学大学院工学系研究科

書誌事項

タイトル別名

• Anti-Stiction Coatings for MEMS Switches Based on Quantitative Evaluation of Adhesion Forces
• ヒョウメン カンリョク ノ テイリョウテキ ヒョウカ ニ モトズク MEMS スイッチ ノ スティクション ボウシマク ノ ケントウ

抄録

An anti-stiction coating with a self-assembled monolayer (SAM) was investigated for ohmic contact micro-electro-mechanical system (MEMS) switches with low-load contacts. SAMs of thiophenol (TP) or 2-naphthalenethiol (2-NT) were coated on Au samples with variations in surface roughness to investigate the effects of the surface asperities on the adhesion force. The adhesion force was measured using a silicon tipless cantilever in the relative humidity range of 10 to 85% for the SAM coated samples and compared with those for the Au and SiO₂ sample surfaces. The adhesion force measurements indicate that the TP and 2-NT coatings can prevent a liquid meniscus from forming on the device surfaces due to their hydrophobic character caused by the protruding aromatic group. In addition, it was confirmed that these coatings could reduce van der Waals forces more than the Au coating. Based on these results, SAMs of TP and 2-NT have excellent potential as anti-stiction coatings for MEMS switch contacts.

収録刊行物

• エレクトロニクス実装学会誌

  エレクトロニクス実装学会誌 15 (1), 49-58, 2012

  一般社団法人エレクトロニクス実装学会

キーワード

• Adhesion Force
• Atomic Force Microscope
• MEMS Switch
• Self-Assembled Monolayer
• Stiction

詳細情報

• CRID: 1390001204560644864
• NII論文ID: 10030040732
• NII書誌ID: AA11231565
• DOI: 10.5104/jiep.15.49
• COI: 1:CAS:528:DC%2BC38XjtlWrs78%3D
• ISSN: 1884121X
• ISSN: 13439677
• NDL書誌ID: 023436235
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I023436235
• Web Site: https://www.jstage.jst.go.jp/article/jiep/15/1/15_49/_pdf
• 本文言語コード: ja
• データソース種別:
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