Development of 3-D Sensor with Feedback Control of MEMS Mirror Scanner

• NOGUCHI Takuya

  Mitsubishi Electoric Corporation

• HASHIMOTO Mitsuo

  Mitsubishi Electoric Corporation

• SHIRATSUKI Akihide

  Mitsubishi Electoric Corporation

• OKUDA Haruhisa

  Mitsubishi Electoric Corporation

• NAKAJIMA Hajime

  Mitsubishi Electoric Corporation

• SHIKAI Masahiro

  Mitsubishi Electoric Corporation

Bibliographic Information

Other Title

• フィードバック制御を用いたMEMS三次元センサーの開発

Journal

• 電気学会研究会資料. IM, 計測研究会

  電気学会研究会資料. IM, 計測研究会 2012 (31), 1-4, 2012-07-27

Keywords

• 3D-sensor
• Robot
• Cell manufacturing system
• Triangulation
• Scan
• MEMS mirror
• Feedback control

Details

• CRID: 1573950400925514112
• NII Article ID: 10031118739
• NII Book ID: AN00346727
• Text Lang: ja
• Data Source:
  • CiNii Articles