学位論文要旨及び審査要旨公表 : 高周波プラズマにおける駆動周波数の役割と負イオンの挙動に関する研究  [in Japanese]

Journal

Reports of the Faculty of Science and Engineering, Saga University   [List of Volumes]

Reports of the Faculty of Science and Engineering, Saga University 26(1), 148-150, 1997-06  [Table of Contents]

Saga University

Codes

  • NII Article ID (NAID) :
    110000452916
  • NII NACSIS-CAT ID (NCID) :
    AN00096787
  • Text Lang :
    JPN
  • ISSN :
    03856186
  • Databases :
    NII-ELS