ヘッドオン型Ar<SUB>2</SUB>*, Kr<SUB>2</SUB>*エキシマ光照射装置の特性

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タイトル別名
  • Basic Performance of VUV Exposure Systems Using Head-on Type Ar<SUB>2</SUB>* and Kr<SUB>2</SUB>* DBD Excimer Lamps
  • ヘッドオン型Ar2,Kr2エキシマ光照射装置の特性
  • ヘッドオンガタ Ar2 Kr2 エキシマ ヒカリ ショウシャ ソウチ ノ トクセイ

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As an application of dielectric barrier discharge (DBD) lamps, vacuum ultraviolet (VUV) exposure systems of both Ar2 and Kr2* excimers have been developed and their basic performance has been evaluated. Each system comprises a 20W DBD excimer lamp, a sinusoidal wave highvoltage power supply, and a cylindrical lamp holder. A high-voltage transformer and a lamp are designed to be set as close together as possible in the holder. The inside of the holder is purged by nitrogen gas when it is in use. The excimer lamp has an MgF2 window at the lamp end and is a “head-on type” lamp.<BR>The head-on type Ar2* excimer VUV system produced monochromatic light at 127nm (with a 9.8nm FWHM). It's irradiance had an almost homogeneous distribution within a 15-mm diameter planar circle at 50mm from the output window and was about 0.4mW/cm2.<BR>The head-on type Kr2* excimer VUV system produced monochromatic light at 147nm (with a 13.2nm FWHM). It's irradiance had an almost homogeneous distribution within a 15-mm diameter planar circle at 50mm from the output window and was about 1.4mW/cm2.<BR>The lifetime of the lamps in these system is defined as the time point at which irradiance drops to 50% of its initial value. It was 500 and 1500h, respectively, for the Ar2* and Kr2* excimer lamps.

収録刊行物

  • 照明学会誌

    照明学会誌 84 (5), 290-295, 2000

    一般社団法人 照明学会

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