改良逐次３点法による直線運動精度の計測

• 山口 城治

  学生会員 東京工業大学大学院

書誌事項

タイトル別名

• Measurement of Straight Motion Accuracy Using the Improved Sequential Three-Point Method.
• カイリョウ チクジ 3テンホウ ニ ヨル チョクセン ウンドウ セイド ノ ケ

抄録

The purpose of the paper is to realize precise measurement of straight motion accuracy over long travel. The reversal method as well as the sequential three-point method is conventional. However, it is difficult to measure motion accuracy over long travel precisely using either method. The paper proposes a new precise measuring method which will be called the improved sequential three-point method. In this method, the principles of the reversal method and the sequential three-point method are introduced. Straight motion accuracy of a slide table was measured over 850mm travel using the improved sequential three-point method. The standard deviations from 12times measurements were 1.0μm in horizontal position and 2.0arc sec in yaw angle.

収録刊行物

• 精密工学会誌

  精密工学会誌 59 (5), 773-778, 1993

  公益社団法人 精密工学会

キーワード

• straight motion
• motion measurement
• sequential three-point method
• reversal method
• linear air bearing

詳細情報

• CRID: 1390001204763801856
• NII論文ID: 10002974887
• NII論文ID: 110001367380
• NII書誌ID: AN1003250X
• DOI: 10.2493/jjspe.59.773
• ISSN: 1882675X
• ISSN: 09120289
• NDL書誌ID: 3822318
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3822318
• 本文言語コード: ja
• データソース種別:
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• 抄録ライセンスフラグ: 使用不可