超精密軸対称加工品の形状測定に関する研究(第1報)

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書誌事項

タイトル別名
  • Study on Measurement of Axisymmetrical Form Generated by Ultra-Precision Machining (1st Report)
  • 超精密軸対称加工品の形状測定に関する研究-1-測定原理とシミュレーション
  • チョウ セイミツジク タイショウ カコウヒン ノ ケイジョウ ソクテイ ニ カ
  • Principle and Simulation of Measurement
  • 測定原理とシミュレーション

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抄録

A study is presented on measurement of axisymmetrical form generated by ultra-precision machining. At first, sectional curves along concentric circles and diameters are measured by a contact type form measuring equipment. Secondly, these sectional curves are combined on cross points by least square method to compensate measuring errors due to tilts and lifts of the specimen. Consequently, the sectional curves can be evaluated based on the identical basic plane. After that, a curved surface is generated by interpolation from sectional curves and is shown as three dimensional display. The effectiveness of this method is revealed by simulation using actual form obtained by Fizeau interferometer.

収録刊行物

  • 精密工学会誌

    精密工学会誌 60 (6), 867-871, 1994

    公益社団法人 精密工学会

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