書誌事項
- タイトル別名
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- Development of a Flexible Electrostatic Linear Actuator. Evaluation of thrust force.
- ジュウナン ナ コウゾウ オ ユウスル セイデン フィルム アクチュエータ ノ カイハツ スイリョク トクセイ ヒョウカ
- Evaluation of thrust force
- 推力特性評価
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抄録
A flexible electrostatic linear actuator has been developed. The actuator consists of a pair of a stator film and a slider film. Films are fabricated using flexible printed circuit technology. Size of the film is 29mm x80mm x 200μm and weight is 0.7g. Since this actuator consists of flexible films only, it can be bent easily. In this study, thrust force of the actuator, when it is bent, is analyzed theoretically. The theoretical analysis indicates that the actuator can work with sufficiently large force even if it is bent π rad. The theory is verified by experiment. Furthermore, two kinds of multi-layered structure are proposed for high power applications.
収録刊行物
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- 精密工学会誌
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精密工学会誌 69 (3), 443-447, 2003
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390282679773753472
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- NII論文ID
- 110001368458
- 10012460799
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
- http://id.crossref.org/issn/09120289
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- NDL書誌ID
- 6486028
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可