Synthesis of cubic boron nitride film by an RF plasma CVD method.

• ISHIGURO Takashi

  長岡技術科学大学

• SAITOH Hidetoshi

  長岡技術科学大学大学院

• ICHINOSE Yukio

  長岡技術科学大学

Bibliographic Information

Other Title

• ＲＦプラズマＣＶＤ法によるｃＢＮ膜
• RF プラズマ CVDホウ ニ ヨル cBN マク

Journal

• Journal of the Japan Society for Precision Engineering

  Journal of the Japan Society for Precision Engineering 53 (10), 1527-1531, 1987

  The Japan Society for Precision Engineering

Keywords

• cubic boron nitride
• hexagonal boron nitride
• RF plasma CVD
• cyclotriborazane: (BH<SUB>2</SUB>NH<SUB>2</SUB>)<SUB>3</SUB>
• activated hydrogen
• infrared absorption spectra

Details

• CRID: 1390001204796816000
• NII Article ID: 110001368994
• NII Book ID: AN1003250X
• DOI: 10.2493/jjspe.53.1527
• ISSN: 1882675X
• ISSN: 09120289
• NDL BIB ID: 3157988
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3157988
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles