Ｆｒａｎｈｏｆｅｒ回折による超精密ダイヤモンド旋削面の粗さ測定

• 三好 隆志

  正会員 北海道大学工学部

• 宮腰 貴宏

  学生会員 北海道大学工学部

• 斎藤 勝政

  正会員 北海道大学工学部

書誌事項

タイトル別名

• Measurement of fine surface roughness in ultra-precision diamond tool machining based on Fraunhofer diffraction.
• Fraunhofer カイセツ ニ ヨル チョウ セイミツ ダイヤモンド セン

抄録

A new measuring method which can estimate quantitatively the periodical fine surface roughness, for example the surface of magnetic memory disk and laser mirror finished by ultraprecision diamond tool machining is presented in this paper. This principle of measurement is based on Fraunhofer diffraction. Relations between the surface roughness and Fraunhofer diffraction patterns of diamond turning surfaces are discussed theoretically and experimentally. The results obtained are summarized as follows: A conventional equation which can accurately estimate the surface roughness of less than 200nm R_max by measuring the intensity values of 0-3 order diffractions is derived from theoretical analysis based on Fraunhofer diffraction. From the measurements of surface roughness of various workpieces including a magnetic memory disk, it is found that this Fraunhofer diffraction method makes it possible to measure the surface roughness within 10% errors from 1nm to the maximum 200nm.

収録刊行物

• 精密工学会誌

  精密工学会誌 53 (5), 736-742, 1987

  公益社団法人 精密工学会

キーワード

• ultra-precision
• diamond tool
• optical measurement
• Fraunhofer diffraction
• surface roughness

詳細情報

• CRID: 1390282679774785024
• NII論文ID: 110001369189
• NII論文ID: 10003573316
• NII書誌ID: AN1003250X
• DOI: 10.2493/jjspe.53.736
• ISSN: 1882675X
• ISSN: 09120289
• ISSN: http://id.crossref.org/issn/09120289
• NDL書誌ID: 3125691
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3125691
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可