An Ultra Precision Straight Motion System (2nd Report)

• MATSUMOTO Hideki

  学生会員 東京工業大学大学院

• YAMAGUCHI Joji

  学生会員 東京工業大学大学院

• AOYAMA Hisayuki

  正会員 静岡大学工学部

• SHIMOKOHBE Akira

  正会員 東京工業大学精密工学研究所

Bibliographic Information

Other Title

• 超高精度直線運動機構 (第2報)
• 超高精度直線運動機構-2-5自由度の制御
• チョウ コウ セイド チョクセン ウンドウ キコウ 2 5 ジユウド ノ セイ
• 5自由度の制御
• Five Degrees of Freedom Control of Motion

Abstract

In order to realize straight motion at the highest level of accuracy, the system is introduced in which five degrees of freedom of a moving table vertical and horizontal positions, and pitch, roll and yaw angles are controlled precisely. The table is supported by active air bearings composed of piezo-actuators and air pads. Motion accuracies of the table to the straight edge masters are measured by several capacitance micrometers. Control system with PID-PD controller is designed and motion-positioning resolutions of 0.02 μm and 0.02 arc sec are achieved. Straight motion accuracies were 0.05 μm in vertical and horizontal positions, 0.06 arc sec in pitch, 0.07 arc sec in roll and 0.03 arc sec in yaw angles over 1 000 mm travel at table speed of 10 mm/s.

Journal

• Journal of the Japan Society for Precision Engineering

  Journal of the Japan Society for Precision Engineering 54 (10), 1945-1950, 1988

  The Japan Society for Precision Engineering

Keywords

• straight motion
• linear air bearing
• active air bearing
• PZT actuator
• motion control
• PID-PD controller

Details

• CRID: 1390282679773944832
• NII Article ID: 110001369376
• NII Book ID: AN1003250X
• DOI: 10.2493/jjspe.54.1945
• ISSN: 1882675X
• ISSN: 09120289
• NDL BIB ID: 3205264
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3205264
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed