書誌事項
- タイトル別名
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- Detection of Small Convex and Concave Defects on Optical Films by Patterned Illumination (2nd Report). Estimation of Defect Detection by using Ray Tracing Method.
- パターン ショウメイ オ モチイタ フィルム ヒョウメン オウトツ ケッカン ノ ケンシュツ 2 コウガク シミュレーション ニ ヨル ケッカン ケンシュツ ヒョウカ
- Estimation of Defect Detection by using Ray Tracing Method
- 光学シミュレーションによる欠陥検出評価
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抄録
This paper describes a validation of the detection system with patterned illumination for convexo-concave defects on optical films by using the ray tracing method. The method is based on a phenomenon that stripe patterns in a reflected image are locally blurred by the existences of their defects. The high-contrast repetition pattern such as stripe is effective. The detection algorithm proposed in the previous report is shown briefly. Then, the ray tracing method is applied to the estimation of images reflected from the films. The estimated images are very much in accord with the experimental ones. By estimating in various conditions including defect size and optical arrangement, optimum pattern spacing is found.
収録刊行物
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- 精密工学会誌
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精密工学会誌 67 (7), 1135-1139, 2001
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390282679772736896
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- NII論文ID
- 110001373210
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL書誌ID
- 5830107
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可