コンピュータ部品のナノ表面加工技術(<特集>技術立国日本がめざす21世紀のモノづくり)  [in Japanese] Nano-Surface Treatment Technology for Computer Parts(<Special Issue>Manufacturing Visions of High-Tech Nation Japan in the 21st Century)  [in Japanese]

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Keywords

• mirror finishing
• chemical polishing
• electro polishing
• deburring
• micro cleaning
• passivation

Codes

• NII Article ID (NAID) :

  110001373260

• NII NACSIS-CAT ID (NCID) :

  AN1003250X

• Text Lang :

  JPN

• Article Type :

  REV

• ISSN :

  09120289

• NDL Article ID :

  6032696

• NDL Source Classification :

  ZN12(科学技術--機械工学・工業--精密機械)

• NDL Call No. :

  Z16-466

• DOI :

  10.2493/jjspe.68.27

• Databases :

  CJP  NDL  NII-ELS  Journal@rchive