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A new method of quantitative electron probe microanalysis was proposed. By this method the precise measurements of chemical composition can be done without measuring intensity of background which was expressed by the additive property of intensities of continuous X-rays irradiated from each element in the sample. A computor programming of the quantitative analysis was made and the results of the computation could be graphic out by a plotter. The present method was applied to analysis of various alloys, and it was found that the results obtained through the use of this method have been fairly good having the accuracy of 0.03% in relative error.