TY  - JOUR
AU  - SHINOHARA, Wataru
AU  - YAMAMOTO, Yasuaki
AU  - KIYAMA, Seiichi
TI  - Characterization of LD-pumped YAG Laser Processing for Transparent Conductive Oxide
T2  - Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers
SN  - 13488724
PY  - 2005
DA  - 2005/01/05
VL  - 71
IS  - 1
SP  - 131-135
UR  - http://ci.nii.ac.jp/naid/110001824110/en/
DO  - 10.2493/jspe.71.131
ER  -