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アモルファスシリコン (a-Si) 系太陽電池に必要なガラス基板上に形成された透光性導電酸化膜のレーザパターニングに対し, 熱的損傷に関するレーザ光パルス幅の影響を評価し, ランプ励起方式に比べ, LD励起方式の方が熱的損傷を低減できることを明らかにした. また, レーザ照射条件と加工特性との関係を実験的に検討し, 電気的特性と高品位な被加工部形状とを両立する加工条件を見出した.
The present paper deals with the LD-pumped YAG laser processing technique for transparent conductive oxide, which has been used in solar cells as a transparent electrode. The effect of pulse width on damage caused to the glass substrates is investigated theoretically and experimentally. And then laser power and the distance between focal point of the lens and the substrate (defocused distance) are investigated. It is found that LD-pumped YAG laser, which has a short pulse width, can be used to pattern SnO_2 without damaging the glass substrate. And the characteristics of the machined groove can be changed by changing the laser power and defocused distance. Consequentially, a high quality groove, which has high electrical resistance and aspect ratio, can be obtained.