TY - JOUR AU - ISOBE, Hiromi AU - KONDOU, Katsunori AU - KYUSOJIN, Akira TI - Development of Non-contact Ultrasonic Motor with Motion Error Compensation in Radial Direction T2 - Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers SN - 13488724 PY - 2005 DA - 2005/01/05 VL - 71 IS - 1 SP - 136-140 UR - http://ci.nii.ac.jp/naid/110001824111/en/ DO - 10.2493/jspe.71.136 ER -