27p-R-12 Synthesis of oriented thin film of Ta_2O_5 with reactive magnetron sputtering in an ECR-excited Oxygen plasma source.

• Akitsu T.

  Yamanashi University

• Sukegawa T.

  Yamanashi University

• Nakamae S.

  Yamanashi University

• Nakagawa Y.

  Yamanashi University

• Matsuzawa H.

  Yamanashi University

Bibliographic Information

Other Title

• 27p-R-12 ECR励起プラズマ中の反応性マグネトロン・スパッタリングによるTa_2O_5薄膜の合成

Journal

• Meeting Abstracts of the Physical Society of Japan

  Meeting Abstracts of the Physical Society of Japan 1995.4 (0), 156-, 1995

  The Physical Society of Japan

Details

• CRID: 1390282681139705216
• NII Article ID: 110001982934
• DOI: 10.11316/jpsgaiyoj.1995.4.0_156_1
• ISSN: 24331171
• Text Lang: ja
• Data Source:
  • JaLC
  • CiNii Articles