@article{IshikawaI:1994-08-16,
author="Ishikawa, I and Nagaseki, k and Kobayashi, H and Nishimura, E and Saito, Y and Suganomata, S",
title="2p-A-11 Influences of Gas Flow Rate on Charcteristics of SF_6 13.56 MHz Discharge",
journal="Abstracts of the meeting of the Physical Society of Japan. Sectional meeting",
ISSN="",
publisher="The Physical Society of Japan (JPS)",
year="1994",
month="aug",
volume="1994",
number="4",
pages="119",
URL="http://ci.nii.ac.jp/naid/110001990818/en/",
DOI="",
}