2p-A-11 SF_6 13.56MHz 放電特性のガス流量依存  [in Japanese] 2p-A-11 Influences of Gas Flow Rate on Charcteristics of SF_6 13.56 MHz Discharge  [in Japanese]

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Author(s)

Journal

  • Abstracts of the meeting of the Physical Society of Japan. Sectional meeting   [List of Volumes]

    Abstracts of the meeting of the Physical Society of Japan. Sectional meeting 1994(4), 119, 1994-08-16  [Table of Contents]

    The Physical Society of Japan (JPS)

Codes

  • NII Article ID (NAID)
    110001990818
  • NII NACSIS-CAT ID (NCID)
    AN10453836
  • Text Lang
    JPN
  • Data Source
    NII-ELS 
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