15a-DL-5 A Quantitative Estimation of Microdefects in an As-Grown CZ-Silicon Crystal by High-Energy X-Ray Section Topography

15a-DL-5 高エネルギーX線セクショントポグラフィーによるAs-Grown CZ-シリコン結晶中の微小欠陥の定量的評価 [in Japanese] 15a-DL-5 A Quantitative Estimation of Microdefects in an As-Grown CZ-Silicon Crystal by High-Energy X-Ray Section Topography [in Japanese]

Abstracts of the meeting of the Physical Society of Japan. Sectional meeting [List of Volumes]

Abstracts of the meeting of the Physical Society of Japan. Sectional meeting 1993(2), 610, 1993-09-20 [Table of Contents]

The Physical Society of Japan (JPS)