15pTE-7 Modification of silicon surface irradiated with highly charged ions

• Takahashi S.

  UEC Laser

• Tona M.

  CREST

• Nagata K.

  JST

• Yoshiyasu N.

  UEC Laser

• Nakamura N.

  UEC

• Sakurai M.

  UEC Laser

• Yamada C.

  Kobe Univ.

• Ohtani S.

  UEC

Bibliographic Information

Other Title

• 15pTE-7 多価イオン照射によるシリコン表面の改質 II(原子 分子, 領域 1)

Journal

• Meeting Abstracts of the Physical Society of Japan

  Meeting Abstracts of the Physical Society of Japan 59.2.2 (0), 141-, 2004

  The Physical Society of Japan

Details

• CRID: 1390001205997033216
• NII Article ID: 110002051377
• DOI: 10.11316/jpsgaiyo.59.2.2.0_141_4
• ISSN: 21890803
• Text Lang: ja
• Data Source:
  • JaLC
  • CiNii Articles