30pZL-11 高周波放電の絶縁破壊特性 XI : 電子の反射の影響  [in Japanese] Breakdown characteristics of RF discharge XI : influence of electron reflection  [in Japanese]

Journal

Meeting abstracts of the Physical Society of Japan   [List of Volumes]

Meeting abstracts of the Physical Society of Japan 58(1-2), 240, 2003-03-06  [Table of Contents]

The Physical Society of Japan (JPS)

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Codes

  • NII Article ID (NAID) :
    110002214309
  • NII NACSIS-CAT ID (NCID) :
    AA11439205
  • Text Lang :
    JPN
  • ISSN :
    13428349
  • Databases :
    NII-ELS