Corrosion Resistance of Aluminum Nitride as Semiconductor Equipment Parts Studied by Micro-Raman Spectroscopy

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  • FUJIMORI Hirotaka
    Applied Medical Engineering Science, Graduate School of Medicine and Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University
  • TAMURA Yoji
    Applied Medical Engineering Science, Graduate School of Medicine and Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University
  • HARITA Akira
    Tokuyama Corporation
  • IOKU Koji
    Applied Medical Engineering Science, Graduate School of Medicine and Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University
  • KAKIHANA Masato
    Materials and Structures Laboratory, Tokyo Institute of Technology
  • YOSHIMURA Masahiro
    Materials and Structures Laboratory, Tokyo Institute of Technology
  • GOTO Seishi
    Applied Medical Engineering Science, Graduate School of Medicine and Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University

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Other Title
  • 顕微ラマン散乱による窒化アルミニウム半導体製造装置用部品の耐食性に関する研究
  • ケンビラマン サンラン ニ ヨル チッカ アルミニウム ハンドウタイ セイゾウ ソウチヨウ ブヒン ノ タイショクセイ ニ カンスル ケンキュウ

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Abstract

A micro-Raman spectroscopic investigation has been performed to observe structural disorder in each grain of aluminum nitride ceramics as semiconductor equipment parts. A selective thermal oxidation treatment normalizes a different rate of a corrosion reaction depending on the crystal face and consequently improves the corrosion resistance. Upon thermal oxidation treatment, line widths of Raman bands increased more in grains including mainly crystals with (100) preferred orientation than in those of (002), indicating that (100) faces oxidize preferentially rather than (002) faces. According to Raman shift from the oxidized sample, oxidation induces residual compressive stress for grains including a large number of (100) prefer-oriented crystals. On fluorination of the oxidized sample, no increase of line widths was observed in both kinds of grains, suggesting that prior anisotropic thermal oxidation treatment of (100) faces, which are more sensitive to corrosion than (002) faces, inhibits the progress of corrosion.<br>

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