チタン酸ストロンチウム系半導体コンデンサーの粒界構造のＴＥＭ観察

• 柴垣 茂樹

  住友金属工業 (株) エレクトロニクス技術研究所

• 亀井 一人

  住友金属工業 (株) エレクトロニクス技術研究所

書誌事項

タイトル別名

• TEM Analysis of Grain Boundaries in SrTiO3-Based Semiconductor Ceramics.
• チタンサン ストロンチウムケイ ハンドウタイ コンデンサー ノ リュウカイ コウゾウ ノ TEM カンサツ

抄録

Structures of grain boundaries of SrTiO₃ semiconductive capacitor have not been fully elucidated. Several studies were focused on the SrTiO₃ systems which include additives, such as, Al₂O₃ or SiO₂. In this study, we first investigated the grain boundaries of Sr_0.975Ca_0.025TiNb_0.004O₃ which did not contain any additives. Then Bi₂O₃/CuO, which is a grain boundary modifier, was also added in order to investigate the process that changes grain boundaries into insulators. Samples heat-treated with Bi₂O₃/CuO were quenched in water and TEM (transmission electron microscopy) was carried out on these microstructures. Grain boundaries of samples sintered in a reduced atmosphere showed segregation of TiO₂ oxide phase, which included no traces of Sr. On the other hand, in grain boundaries of samples heat-treated with the Bi₂O₃/CuO agent, at least two phases existed. One phase included large amounts of Bi and Cu, while the other phase showed only traces of these elements. Near the grain boundaries Bi and Cu diffused into the matrix grains showing inhomogeneous diffusion of which diffusion lengths were different at each side of the grain boundary and seemingly lattice coincident with both grain boundary layers and matrix grains. In addition, steps of about 2nm in height were observed at grain boundaries.

収録刊行物

• Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌)

  Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌) 108 (1259), 666-672, 2000

  公益社団法人 日本セラミックス協会

キーワード

• SrTiO₃
• Boundary layer capacitor
• TEM
• Grain boundary Sr_0.975Ca_0.025TiN_0.004O₃

詳細情報

• CRID: 1390001205247723520
• NII論文ID: 110002289875
• NII書誌ID: AN10040326
• DOI: 10.2109/jcersj.108.1259_666
• ISSN: 18821022
• ISSN: 09145400
• NDL書誌ID: 5394747
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5394747
• Web Site: http://www.jstage.jst.go.jp/article/jcersj1988/108/1259/108_1259_666/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可