酸化スズスパッタ薄膜におけるガス感度特性と粒子配向性の相関性  [in Japanese] Correlation between Gas Sensing Properties and Preferential Orientations of Sputtered Tin Oxide Films  [in Japanese]

Abstract

Investigations on preferential orientation of tin oxide films were carried out under various conditions of film fabrication from the view point of the effect on sensing mechanism. The preferential orientation of (110) crystallographic plane resulted in the increase of sensitivity for H_2 gas. The observed relationship between the sensitivity and preferential orientation has been understood by considering the maximum atomic density on the (110) plane, which ensures the large numbers of adsorption sites for atomospheric gas as well as of direct reaction sites for H_2 gas.

Journal

Journal of the Ceramic Society of Japan   [List of Volumes]

Journal of the Ceramic Society of Japan 100(1165), 1165-1168, 1992-09-01  [Table of Contents]

The Ceramic Society of Japan

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Codes

  • NII Article ID (NAID) :
    110002290094
  • NII NACSIS-CAT ID (NCID) :
    AN10040326
  • Text Lang :
    JPN
  • ISSN :
    09145400
  • NDL Article ID :
    3784290
  • NDL Source Classification :
    無機化学・無機化学工業--セラミックス
  • NDL Source Classification :
    ZP9(科学技術--化学・化学工業--無機化学・無機化学工業--セラミックス・窯業)
  • NDL Call No. :
    Z17-249
  • DOI :
    10.2109/jcersj.100.1165
  • Databases :
    NDL  NII-ELS  Journal@rchive