スピネル型構造をもつZn-Sn系複合酸化物薄膜のガス検知特性  [in Japanese] Gas Sensing Characteristics of Zinc-Tin Complex Oxide Thin Films with Spinel-Type Structure  [in Japanese]

rights: 社団法人日本セラミックス協会rights: 本文データは学協会の許諾に基づきCiNiiから複製したものであるrelation: isVersionOf: http://ci.nii.ac.jp/naid/110002291398/Zn-Sn metallic films were deposited on alumina substrates by an evaporation method, and then complex oxide films were fabricated by annealing in air. The relation between the formation of spinel-type Zn_2SnO_4 and their sensing characteristics to i-C_4H_<10> gas was studied. Both ZnO and SnO_2 films annealed at 500℃ had higher sensitivity to i-C_4H_<10> than the complex oxide films of ZnO and SnO_2 because of fine crystallinity. The sensitivities of the complex oxide films increased with increasing annealing temperature from 600 to 800℃, because of the improved crystallinity. Higher sensitivities were obtained by laminating the complex oxide films. Moreover, the gas selectivity of Zn-Sn complex oxide films for several kinds of gases was investigated. The Zn-Sn complex oxide film had a very high sensitivity to NO_2 gas.

Zn-Sn metallic films were deposited on alumina substrates by an evaporation method, and then complex oxide films were fabricated by annealing in air. The relation between the formation of spinel-type Zn_2SnO_4 and their sensing characteristics to i-C_4H_<10> gas was studied. Both ZnO and SnO_2 films annealed at 500℃ had higher sensitivity to i-C_4H_<10> than the complex oxide films of ZnO and SnO_2 because of fine crystallinity. The sensitivities of the complex oxide films increased with increasing annealing temperature from 600 to 800℃, because of the improved crystallinity. Higher sensitivities were obtained by laminating the complex oxide films. Moreover, the gas selectivity of Zn-Sn complex oxide films for several kinds of gases was investigated. The Zn-Sn complex oxide film had a very high sensitivity to NO_2 gas.