MgO-Al<sub>2</sub>O<sub>3</sub>-SiO<sub>2</sub>系ガラスからの析出結晶とその焼結性

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  • Crystallization and Densification of Powdered Glasses in the System MgO-Al<sub>2</sub>O<sub>3</sub>-SiO<sub>2</sub>
  • MgO Al2O3 SiO2ケイ ガラス カラ ノ セキシュツ ケッショウ ト

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To fabricate glass-ceramics for uses in electronic devices such as multilayer packages for VLSI chips by firing below 1000°C, the compositional range of the glass formation and the precipitation of crystals in the system MgO-Al2O3-SiO2 were investigated. The compositional range which the melts below 1600°C were quenched into water to form the glasses, was determined. A tendency towards expansion beyond the compositional range reported by other workers was recognized in the present work. The single, binary and ternary compounds such as enstatite, spinel or cordierite in the system crystallized in the melts quenched to form the glasses. The metastable phase such as μ-cordierite or MgO⋅Al2O3⋅4SiO2, which can never be developed by solid reaction or crystallization of melts during cooling, precipitated in some glasses. The well sintered glass-ceramics were obtained from glass-compacts with the compositions of 10-35wt% MgO, 10-35wt% Al2O3 and 45-65wt% SiO2 by firing below 1000°C.

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