322 CVDダイヤモンドの核発生とダイヤモンド薄膜の付着強度 : "ひさし"で測る薄膜の界面じん性(OS1-4 表面改質処理と特性評価)(OS1 高強度材・表面改質材の疲労と破壊)  [in Japanese] 322 Nucleation of CVD Diamond and Adhesive Strength of Diamond Films : Measurement of Interface Toughness of Thin Films by Means of "Film Projection"  [in Japanese]

Preview

Keywords

• CVD diamond
• Bias-enhanced nucleation
• Si substrate
• Adhesive toughness

Codes

• NII Article ID (NAID) :

  110002486894

• NII NACSIS-CAT ID (NCID) :

  AA11902139

• Text Lang :

  JPN

• Databases :

  NII-ELS