Silicon Carbide Micromachining And Micromachined Gas Turbines

• TANAKA Shuji

  Department of Mechatronics and Precision Engineering, Tohoku University

• NAKAHASHI Kazuhiro

  Department of Aeronautics and Space Engineering, Tohoku University

• ESASHI Masayoshi

  Department of Mechatronics and Precision Engineering, Tohoku University

• SUGIMOTO Shinya

  Department of Mechatronics and Precision Engineering, Tohoku University

• HARA Motoaki

  Department of Mechatronics and Precision Engineering, Tohoku University

• KAMATSUCHI Toshihiro

  Department of Aeronautics and Space Engineering, Tohoku University

Bibliographic Information

Other Title

• 122 炭化珪素微細加工とマイクロガスタービンとに関する研究

Abstract

In this paper, studies on silicon carbide (SiC) micromachining and micromachined gas turbines are described : (1) SiC micro-reaction-sintering combined with silicon lost mold method has been developed, and SiC micro-rotors of 5 and 10 mm in diameter were fabricated. (2) Deep reactive ion etching (deep-RIE) of sintered SiC is being studied. To date, the etching depth of over 100 μm was achieved at the speed of 0.48 μ/min. using an inductively coupled plasma RIE system with SF_6 gas. (3) Silicon micro-air turbines for rotating an integrated grid polarizer have been fabricated, and the rotational speed of about 10000 rpm was achieved. (4) A computer fluid dynamics (CFD) program is under development for numerical fluid analysis inside micro-gas turbines. The airflow inside the abovementioned micro-air turbine was 2-dimensionally calculated.

Journal

• The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP

  The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP 2000 (0), 92-97, 2000

  The Japan Society of Mechanical Engineers

Keywords

• Silicon Carbide (SiC)
• Power MEMS
• Micro-Gas Turbine
• Reaction-Sintering
• Reactive Ion Etching (RIE)
• Micro-Air Turbine
• Computer Fluid Dynamics (CFD)

Details

• CRID: 1390282680875674368
• NII Article ID: 110002499622
• DOI: 10.1299/jsmeiip.2000.92
• ISSN: 24243140
• Web Site: https://www.jstage.jst.go.jp/article/jsmeiip/2000/0/2000_92/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed