An Active Air Bearing : Control of Radial Axis Motion and Stiffness

• HORIKAWA Oswaldo

  Research Laboratory of Precision Machinery and Electronics, Tokyo Institute of Technology

• SHIMOKOHBE Akira

  Research Laboratory of Precision Machinery and Electronics, Tokyo Institute of Technology

抄録

The aim of this paper is the development of bearings with the following features : ( 1 ) ultrahigh precision, ( 2 ) infinite static stiffness, ( 3 ) high vibration damping capability, ( 4 ) new functions (axis positioning and dynamic stiffness control). For this purpose, an active air journal bearing (AAJB) is proposed. The AAJB is a new type of mechatronics bearing composed of noncontact sensors to detect the radial position of its axis, noncontact actuators (movable air pads driven by PZT actuators) to support and drive the axis, and a controller to regulate the whole system. An experimental AAJB is constructed and experiments prove that the AAJB has the following advantages : ( 1 ) an almost infinite static stiffness and an improved damping capability, ( 2 ) axis positioning over 8μm with a resolution better than l0nm, ( 3 ) an axis rotational accuracy better than 25nm at 1000rpm with an unbalanced load, ( 4 )quick and precise axis positioning at 1OOOrpm by a rectangular reference input.

収録刊行物

• JSME international journal. Ser. 3, Vibration, control engineering, engineering for industry

  JSME international journal. Ser. 3, Vibration, control engineering, engineering for industry 33 (1), 55-60, 1990-03-15

  一般社団法人日本機械学会

キーワード

• Hydro-static Bearing
• Rigidity
• Positioning
• Vibration Control
• Controlled Bearing
• Active Damping

詳細情報

• CRID: 1572824501931884160
• NII論文ID: 110002502261
• NII書誌ID: AA10680610
• ISSN: 09148825
• 本文言語コード: en
• データソース種別:
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