Self-Excited Vibrations of Wire-Winding-Type Growing Apparatus for Silicon Single Crystals : Experimental Results and Considerations Relevant to Self-Excited Vibrations

• OTA Hiroshi

  Faculty of Engineering, Nagoya University

• MIZUTANI Kazuki

  Faculty of Engineering, Mie University

• FUJITA Takashi

  Mitsubishi Electric Corporation Kobe Works

抄録

In order to minimize the height of a wire-winding-type growing apparatus for silicon single crystals, a wire-rope winding method or a ball-chain winding method is used instead of a stiff shaft pulling a single crystal. When the wire-rope or the ball-chain rotates, amplitudes of the whirling vibration increase gradually with time, and a self-excited vibration occurs. In this paper, the cause of this self-excited vibration is studied experimentally using a model of the wire-winding-type growing equipment for silicon single crystals. The self-excited vibration of a wire-rope occurs when the rotation is above a resonant speed of the wore-rope system, and then only the forward whirling of a wire-rope becomes unstable, independent of the direction of an initially added whirling. On the basis of the experimental results, it is clarified that self-excited vibrations of silicon single crystal growing apparatus are due to an internal friction among element wires of the rope.

収録刊行物

• JSME international journal. Ser. 3, Vibration, control engineering, engineering for industry

  JSME international journal. Ser. 3, Vibration, control engineering, engineering for industry 32 (4), 554-559, 1989-12-15

  一般社団法人日本機械学会

キーワード

• Vibration ,Self-Excited Vibration
• Internal Friction
• Czochralski Growing Apparatus

詳細情報

• CRID: 1574231876815846528
• NII論文ID: 110002505173
• NII書誌ID: AA10680610
• ISSN: 09148825
• 本文言語コード: en
• データソース種別:
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