HDI-13 ACTIVE HEAD SLIDERS USING PIEZOELECTRIC THIN FILMS FOR FLYING-HEIGHT CONTROL

SUZUKI Kenji, AKIMATSU Takayuki, SASAKI Kenji, KURITA Masayuki

doi:10.1299/jsmemipe.2003.99

HDI-13 ACTIVE HEAD SLIDERS USING PIEZOELECTRIC THIN FILMS FOR FLYING-HEIGHT CONTROL

DOI Web Site

SUZUKI Kenji

Department of Engineering Synthesis, Faculty of Engineering, The University of Tokyo
AKIMATSU Takayuki

Department of Engineering Synthesis, Faculty of Engineering, The University of Tokyo
SASAKI Kenji

Department of Engineering Synthesis, Faculty of Engineering, The University of Tokyo
KURITA Masayuki

Mechanical Engineering Research Laboratory, Hitachi, Ltd.

抄録

This paper describes design and fabrication of a MEMS-based active head slider using a PZT thin film for flying height control in magnetic recording. An air bearing surface (ABS) geometry which generates very low aerodynamic lift force at the head has been designed. The slider has been fabricated monolithically by silicon micromachining process. Change in the flying height of the head above a spinning disk has been successfully confirmed by applying voltage to the PZT actuator.