MMT-07 NANO-SERVOMECHANICS OF A MEMS DEVICE FOR AFM-BASED STORAGE TECHNOLOGY

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抄録

Nanoscale mechanics and servo control of a MEMS-based scanner device are considered for two-dimensional motion generation. A servo structure is dedsribed that augments a conventional control algorithm, including a digital proportional-integral-derivative type, so that the significant stiffness characteristic of a MEMS-based scanner is neutralized by means of a stiffness-compensation method. This approach has been verified experimentally.

収録刊行物

  • Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE

    Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE 2003, 131-132, 2003

    一般社団法人日本機械学会

各種コード

  • NII論文ID(NAID)
    110002509125
  • NII書誌ID(NCID)
    AA1190303X
  • 本文言語コード
    ENG
  • データ提供元
    NII-ELS 
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