MMT-07 NANO-SERVOMECHANICS OF A MEMS DEVICE FOR AFM-BASED STORAGE TECHNOLOGY

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Author(s)

Abstract

Nanoscale mechanics and servo control of a MEMS-based scanner device are considered for two-dimensional motion generation. A servo structure is dedsribed that augments a conventional control algorithm, including a digital proportional-integral-derivative type, so that the significant stiffness characteristic of a MEMS-based scanner is neutralized by means of a stiffness-compensation method. This approach has been verified experimentally.

Journal

  • Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE

    Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE 2003, 131-132, 2003

    The Japan Society of Mechanical Engineers

Codes

  • NII Article ID (NAID)
    110002509125
  • NII NACSIS-CAT ID (NCID)
    AA1190303X
  • Text Lang
    ENG
  • Data Source
    NII-ELS 
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