741 柔軟除振台の運動と振動の制御  [in Japanese] Motion and Vibration Control for Flexible Isolation Table  [in Japanese]

This paper proposes a new modeling method for controlling and active isolation system with an elastic table and multi modes of vibration. In the lightweight isolation system, the multi modes vibrations appear on elastic table in lower frequency region. In order to control the first to fifth modes of the elastic table, a reduced-order model with 5DOF system is constructed in the vertical direction. And, the flexible table is thought as a rigid body in horizontal direction. So, each model is compiled. For designing the controller, LQ control theory and double-active control method with feed forward control are used. Finally, the discrete model and the controller design are verified through numerical simulations.