1127 インデンテーション法とレーザーアコースティック法による薄膜のヤング率測定  [in Japanese] Young's moduli of coating films measured with nano-indentation technique and laser-acoustic technique  [in Japanese]

Young's modulus is one of the important mechanical properties of coating films. There are some conventional methods to measure the Young's modulus of thin films, the membrane bending test and the nano-indentation test. Nano-indentation test is powerful method for the measurement of thin films with a chickness down to less than 1 um. However, in a case of un-homogeneous film, such as plasma spraying, nano-indentation data shows the value with wide deviation. Laser-acoustic technique is expected as a new measuring method for the thin coatings. We compared the Young's moduli of the plasma spraying films measured with laser-acoustic technique and the nano-indentation technique.