1440 球殻モデルによる非対称高周波放電のシース電圧分布予測  [in Japanese] Estimation of Sheath Voltage Distribution in Asymmetric Radio-Frequency Discharges by Spherical Shell Model  [in Japanese]

Estimation of sheath voltage distribution in asymmetric radio-frequency discharges is important because we can also obtain self-bias voltage which accelerates positive ions to target or wafer. We developed the numerical simulation code for estimation of the sheath voltage distribution and the self-bias voltage. We roughly approximate general asymmetric rf discharges to one-dimensional spherical ones. The results obtained by using our simulation code correspond with experimental results and can be explained theoretically.