Magnetic properties and frequency characteristics of (CoFeB)x-(Si01.9)i-x and CoFeB films for RF application

• Munakata Makoto

  Sojo Univ., Energy Electronics Laboratory, Sojo Univ.

• Namikawa Masashi

  Sojo Univ., Energy Electronics Laboratory, Sojo Univ.

• Motoyama Mashio

  Delta Works

• Yagi Masaaki

  Institute of Multidisciplinary Research for Advanced Materials, Tohoku Univ.

• Shimada Yutaka

  Institute of Multidisciplinary Research for Advanced Materials, Tohoku Univ.

• Yamaguchi Masahiro

  Research Institute of Electrical Communication, Tohoku Univ.

• Arai Ken-Ichi

  Research Institute of Electrical Communication, Tohoku Univ.

書誌事項

タイトル別名

• Magnetic properties and frequency characteristics of (CoFeB)<SUB>x-</SUB>(Si0<SUB>1.9</SUB>)<SUB>i-x</SUB> and CoFeB films for RF application

抄録

(CoFeB)-(Si0_1.9) and CoFeB films were fabricated by synchronous triple RF magnetron sputtering with rotating a cylindrical electrode. Three types films for RF application in the range over 1 GHz were obtained, and these permeability characteristics and micro-structures were investigated.<BR>The as-deposited films exhibited large anisotropy field H_κ in the range from 40 to 550 Oe, and exhibited highferromagnetic resonance (FMR) frequencies of 1.6-6.0 GHz in permeability characterisrtics. The films exhibited amorphous like or hetero-amorphous structures, which led to good soft magnetic properties with electrical resistivity ρ of 100-100, 000 μΩcm and saturation magnetization 4πM_s, of 6.5-20kG.<BR>It was found that the obtained larger Hκ was effective to attain the higher frequency characteristics with the lower losses for RF inductor cores.

収録刊行物

• Ｔｒａｎｓａｃｔｉｏｎｓ　ｏｆ　ｔｈｅ　Ｍａｇｎｅｔｉｃｓ　Ｓｏｃｉｅｔｙ　ｏｆ　Ｊａｐａｎ

  Ｔｒａｎｓａｃｔｉｏｎｓ　ｏｆ　ｔｈｅ　Ｍａｇｎｅｔｉｃｓ　Ｓｏｃｉｅｔｙ　ｏｆ　Ｊａｐａｎ 2 (5), 388-393, 2002

  社団法人 日本磁気学会

キーワード

• synchronous triple RF magnetron sputtering
• large anisotropy field
• FMR frequency
• amorphous
• hetero-amorphous

詳細情報

• CRID: 1390001205223611392
• NII論文ID: 110002666047
• NII書誌ID: AA1158094X
• DOI: 10.3379/tmjpn2001.2.388
• ISSN: 18846726
• ISSN: 13467948
• ISSN: http://id.crossref.org/issn/13467948
• 本文言語コード: en
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可