シリコン融液の表面張力測定 : 気相の酸素分圧制御を中心として(<小特集>バルク結晶成長の新しいアプローチ)

• 向井 楠宏

  九州工業大学工学部物質工学科

• 牛 王剛

  九州工業大学工学部物質工学科

書誌事項

タイトル別名

• On the Measurements of Surface Tension of Molten Silicon : in Relation to the Controlof Oxygen Partial Pressure(<Special Issue> New Approaches for Bulk Cristal Growth)
• シリコン融液の表面張力測定--気相の酸素分圧制御を中心として
• シリコン ユウエキ ノ ヒョウメン チョウリョク ソクテイ キソウ ノ サンソ

抄録

Previous studies on the measurements of surface tension of molten silicon containing our recent results were critically reviewed as follows: 1) brief discussions based on the Keene's review on the reported literature values of surface tension σ and its temperature coefficient dσ/dT mainly in relation to the effect of impurities, especially oxygen, by the contamination during the measurements of σ and dσ/dT, 2) short introduction and comments on the various methods for the surface tension measurement reported after the publication of Keene's review, 3) thermodynamic feature of the molten silicon-gas system concerning the relation between partial pressure P_<o2> of oxygen and SiO, and also the relation between oxygen concentration in the silicon and P_<o2>, etc., based on our results, 4) treatment of oxygen in the system for the surface tension measurements, for examples, the method and apparatus for controlling P_<o2> of the system and the quantitative influence of oxygen on σ and dσ/dT, which were obtained by our study.

収録刊行物

• 日本結晶成長学会誌

  日本結晶成長学会誌 23 (2), 93-99, 1996

  日本結晶成長学会

詳細情報

• CRID: 1390001205864599168
• NII論文ID: 110002714603
• NII書誌ID: AN00188386
• DOI: 10.19009/jjacg.23.2_93
• ISSN: 21878366
• ISSN: 03856275
• NDL書誌ID: 3974940
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3974940
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可