マイクロ振動子における微小エネルギーフローの研究 A Micro-Energy Flow of a Microcantilever

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From the viewpoint of a micro energy flow, the microsystems design method is investigated for the microactuators and sensors. A simple microsystem is developed as our model, which is excited photothermally by the light from high power laser diode. The exciting point to vibrate a cantilever at maximum amplitude is obtained near the clamped position, which means the maximum efficiency of energy transmission. The energy dissipation characteristics of the cantilever is analytically evaluated. The quantities of dissipation caused by airflow force, internal friction and support loss are calculated and comparedith with experimental results. As a results, micro energy input position and the relationship between microbeam size and dissipation ratio are evaluated, which makes progress in a design method of the microsystems excited by a wireless energy supply.

収録刊行物

  • 日本時計学会誌

    日本時計学会誌 (157), 15-21, 1996-06-20

    一般社団法人日本時計学会

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各種コード

  • NII論文ID(NAID)
    110002776001
  • NII書誌ID(NCID)
    AN00195723
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    00290416
  • NDL 記事登録ID
    3994476
  • NDL 雑誌分類
    ZN12(科学技術--機械工学・工業--精密機械)
  • NDL 請求記号
    Z16-440
  • データ提供元
    CJP書誌  CJP引用  NDL  NII-ELS 
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