レーザによる超精密形状測定 Ultraprecision Surface Profile Measurement by Laser

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著者

抄録

An ultraprecision surface profile measuring instrument for measuring surface roughness, microangle, profile or the like has been put to practical use as an on-line measuring instrument for a production line.This instrument is based on the principle of optical-heterodyne interferometry using a laser and an acousto-optic device. The resolutions of surface. roughness and microangle are on the order of 0.001μm and 0.001°, respectively. This instrument is scarcely affectcld by the influences of vibration and reflection factor of the sample surface. Therefore, stable measurements can be made, and surf ace profiles can be obtained by an easy data processing method.

収録刊行物

  • 日本時計学会誌

    日本時計学会誌 (116), 1-14, 1986-03-20

    一般社団法人日本時計学会

各種コード

  • NII論文ID(NAID)
    110002776232
  • NII書誌ID(NCID)
    AN00195723
  • 本文言語コード
    JPN
  • ISSN
    00290416
  • NDL 記事登録ID
    3063481
  • NDL 刊行物分類
    M061(測定・測定器)
  • NDL 雑誌分類
    ZN12(科学技術--機械工学・工業--精密機械)
  • NDL 請求記号
    Z16-440
  • データ提供元
    NDL  NII-ELS 
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