多重磁極マグネトロンスパッタリング法で作製したFe‐N薄膜の磁化特性と膜構造
書誌事項
- タイトル別名
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- Magnetic Properties and Film Structure of Fe-N Films prepared by Multipolar Magnetic Plasma Confinement Sputtering Method
- 多重磁極マグネトロンスパッタリング法で作製したFe-N薄膜の磁化特性と膜構造
- タジュウ ジキョク マグネトロンスパッタリングホウ デ サクセイ シタ Fe N ハクマク ノ ジカ トクセイ ト マク コウゾウ
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抄録
Thin films of Fe and Fe-N have been prepared using an rf magnetron sputtering system equiped with multipolar magnetic plasma confinement (MMPC), which is efficient for preparation of ferromagnetic thin films at low pressures. For sputtering with 150 W rf-power, the deposition rate of Fe film is 12-14 nm/min, which is three times larger than that of conventional planar magnetron sputtering system. Iron nitride films have been sputter-deposited in an Ar-N2 gas mixture at several pressures, Psp, of 5-0.6 mTorr and the gas flow ratio, fN2 = N2/(Ar + N2), of 0-0.6. The crystalline and morphological structures, the nitrogen content in the film, and the resistivity depend strongly on Psp and fN2. These dependences are explained by the energy of sputtered particles reached at the film surface. In particular, the films prepared at 0.6 mTorr, which is realized by MMPC method, exhibit the crystalline structures of Fe, Fe4N and Fe3N phases depending on fN2, and show the very high purity.
収録刊行物
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- 日本応用磁気学会誌
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日本応用磁気学会誌 28 (9), 991-996, 2004
公益社団法人 日本磁気学会
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詳細情報 詳細情報について
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- CRID
- 1390282680069732608
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- NII論文ID
- 110002809836
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- NII書誌ID
- AN0031390X
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- ISSN
- 18804004
- 02850192
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- NDL書誌ID
- 7080183
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- NDL-Digital
- CiNii Articles
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- 使用不可